Industry Support | Nanofabrication | Infrastructure

QMI is developing the first nanofabrication facility of its kind in Canada

The newly renovated Nanofabrication Facility, operated by five dedicated engineers and managed by Director Kostis Michelakis, will enhance QMI’s ability to conduct world-class research. This state-of-the-art infrastructure and associated expertise will also be made available to industry partners to provide advanced fabrication services. This facility will also become the cornerstone of the SiEPICfab industry consortium recently established under Lukas Chrostowski’s leadership.

The infrastructure project includes facility upgrades and the purchase of specialized equipment that together, with the recent acquisition of industry-standard tools such as an 8” wafer-capable, electron beam lithography (EBL) tool, will help create the first nanofabrication facility of its kind in Canada.

Phase 1 of this initiative was recently completed with cleanroom upgrades to higher ISO levels. Whereas the previous level was enough to support photolithography work, recent upgrades have increased the cleanliness levels by a factor of 10. The cleanroom will be outfitted and made available to academic and industry users by the end of 2019.

Phase 2 completes this series of upgrades and acquisitions. By retrofitting the existing space and adding a focused ion beam (FIB) system to the current suite of nanofabrication tools, SBQMI will be able offer a more streamlined production process for researchers (from both industry and academia) who are designing nanostructures (optical circuits, for instance) on semi-conductive substrates (wafers) requiring a high degree of reliability and accuracy in the etching process.


For media inquiries or further information, please email Karl Jessen.
To book Nanofabrication Facility equipment such as the EBL, please refer to the facility guidelines and UBC booking system or contact Kostis Michelakis. .

This 8" wafer-capable EBL is already available for use by academic and industry parters.

Dedicated engineers maintain the equipment and facilities.