JEOL JBX-8100FS E-Beam Lithography Tool

SBQMI has invested heavily on acquiring a state-of-the-art electron-beam lithography tool that enables device fabrication at the nanoscale, where quantum properties of materials manifest themselves. An intense, well formed and focused beam of electrons, scanned by precision electronics and driven by computer design data, can directly write features of a few nanometers in size on polymers, across a large wafer area with a diameter up to 8 inches. The best-in-class specifications of the electron-beam writer, combined with its installation within a dedicated, clean and free of vibrations and electromagnetic noise lab, afford SBQMI the capability of fabricating cutting-edge nanostructures quickly and reproducibly. Late 2018.

http://www.nanofab.ubc.ca/

Contact Information

Kostis Michelakis

kostis.michelakis@ubc.ca

(604) 827-3228

2355 East Mall
Vancouver, BC V6T1Z4