The newly renovated Nanofabrication Facility, operated by five dedicated engineers and managed by Operations Manager Pinder Dosanjh, is enhancing Blusson QMI’s ability to conduct world-class research. This state-of-the-art infrastructure and associated expertise is being made available to industry partners to provide advanced fabrication services. This facility is also the cornerstone of the SiEPICfab industry consortium recently established under Lukas Chrostowski’s leadership.
This 8″ wafer-capable EBL is already available for use by academic and industry partners.
The infrastructure project includes facility upgrades and the purchase of specialized equipment that together, with the recent acquisition of industry-standard tools such as an 8” wafer-capable, electron beam lithography (EBL) tool, will help create the first nanofabrication facility of its kind in Canada.
Phase 1 of this initiative was recently completed with cleanroom upgrades to higher ISO levels. Whereas the previous level was enough to support photolithography work, recent upgrades have increased the cleanliness levels by a factor of 10. The cleanroom is now available to academic and industry users.
Phase 2 completes this series of upgrades and acquisitions. Our focused ion beam (FIB) system enables us to offer a more streamlined production process for researchers (from both industry and academia) who are designing nanostructures (optical circuits, for instance) on semi-conductive substrates (wafers) requiring a high degree of reliability and accuracy in the etching process.
To book Nanofabrication Facility equipment such as the EBL, please refer to the facility guidelines and UBC booking system or contact Pinder Dosanjh, Operations Manager, at dosanjh@phas.ubc.ca.
